Parameter | Icon AFM Scanner | FastScan AFM Scanner |
X-Y scan range X-Y方向扫描范围 | 90µm x 90µm typical, 85µm minimum 90µm × 90µm 典型值,最小85µm | 35μm x 35μm typical, 30μm minimum 35µm × 35µm 典型值,最小30µm |
Z range Z方向扫描范围 | 10µm typical in imaging and force curve modes, 9.5µm minimum 在成像及力曲线模式下典型值为10μm;最小9.5μm | ≥3μm |
Vertical noise floor 垂直方向噪音基底 | <30pm RMS in appropriate environment typical imaging BW (up to 625Hz) <30pmRMS, 在合适的环境及典型的成像带宽(达到625Hz) | < 40pm RMS, sensor in appropriate environment (up to 625Hz) < 40pmRMS, 在合适的环境(达到625Hz) |
X-Y tip-velocity max. (1% tracking error) | | >2mm/Sec |
Z tip-velocity max. | | 12mm/Sec |
X-Y position noise (closed-loop) X-Y定位噪音(闭环) | ≤0.15nm RMS typical imaging BW (up to 625Hz) ≤0.15nm RMS,典型成像带宽(达到625Hz) | ≤0.20nm RMS typical imaging BW (up to 2.5kHz in Adaptive) ≤0.20nm RMS,典型成像带宽(达到625Hz) |
X-Y position noise (open-loop) X-Y定位噪音(开环) | ≤0.10nm RMS typical imaging BW (up to 625Hz) ≤0.10nm RMS,典型成像带宽(达到625Hz) | |
Z sensor noise level (closed-loop) Z传感器噪音水平(闭环) | 35pm RMS typical imaging BW (up to 625Hz); 50pm RMS, force curve BW (0.1Hz to 5kHz) 35pm RMS,典型成像带宽(达到625Hz); 50pm RMS,力曲线成像带宽(0.1Hz to 5kHz) | 30pm RMS typical imaging BW (up to 625Hz) 30pm RMS,典型成像带宽(达到625Hz) |
Integral nonlinearity(X-Y-Z) 整体线性误差(X-Y-Z) | <0.5% typical <0.5% 典型值 | ≤0.5% typical ≤0.5% 典型值 |
Sample size/holder 样品尺寸/夹具 | 210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick 210mm 真空吸盘样品台;夹具,直径 ≤210mm, 厚度 ≤15mm |
Motorized position stage (X-Y axis) 电动定位样品台(X-Y轴) | 180mm × 150mm inspectable area; (180mm × 150mm可视区域;) 2µm repeatability, unidirectional; (单向2um重复性;) 3µm repeatability, bidirectional (双向3um重复性) |
Microscope optics 显微镜光学系统 | 5-megapixel digital camera; 180µm to 1465µm viewing area; Digital zoom and motorized focus 五百万像素数字照相机; 180 µm 至 1465 µm 可视范围; 数字缩放及自动对焦功能 | 5-megapixel digital camera; 130µm to 1040µm viewing area; Digital zoom and motorized focus 五百万像素数字照相机; 130 µm 至 1040 µm 可视范围; 数字缩放及自动对焦功能 |
Controller 控制器 | NanoScope V / NanoScope v8.15 and later NanoScope V型控制器 |
Workstation 工作站 | Integrates all controllers and provides ergonomic design with immediate physical and visual access 整合所有控制器、结合人体工学设计,提供直接的物理或可视接口 |
Vibration and Acoustic isolation 振动隔绝 与 声音隔绝 | Integrated, refer to installation requirements for additional information |
AFM modes AFM模式 | Standard: ScanAsyst, PeakForce Tapping, TappingMode (air), Contact Mode, Lateral Force Microscopy, PhaseImaging, Lift Mode, MFM, Force Spectroscopy, Force Volume, EFM, Surface Potential, Piezoresponse Microscopy, Force Spectroscopy; Optional: PeakForce QNM, HarmoniX, Nanoindentation, Nanomanipulation, Nanolithograpy, Force Modulation (air/fluid), TappingMode (fluid), Torsional Resonance Mode, Dark Lift, STM, SCM, C-AFM, SSRM, PeakForce TUNA,TUNA, TR-TUNA, VITA | Standard: ScanAsyst, Nanomechanical Mapping, TappingMode (air), TappingMode (fluid), PhaseImaging, Contact Mode, Lateral Force Microscopy, Lift Mode, MFM, EFM, Force Spectroscopy, Force Volume Optional: Nanoindentation, Nanomanipulation, Nanolithograpy, Surface Potential, Piezoresponse Microscopy |
Certification 认证 | CE |